EFEM – GEM300 (Auto Sorter)
- Suitable for：Si wafer
- Main Mechanism composition：1.Load port #1 (Unload)
2.Load port #2 (Load)
3.Aligner
4.Robot
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- Process
- Advantages
- Specifications
- SECS/GEM300 Intelligent Communication Link Equipment.
- Stable, space saving, low noise.
- Suitable for FOUP/FOSB cassettes, with RFID reading function.
- Automatically or manually to flip the wafer, and it can be used as a sorter.
| Model | WGR1600-OCR-GEM300 |
|---|---|
| Machine dimensions | ~ 1600mm (L) x 1300mm (W) x 1900mm (H) |
| Power supply | three phase 220VAC 60HZ |
| Air pressure | 5kg/cm^2 |
| Vacuum | -80kpa |
| Machine weight | ~1200kg |
| Control system | PLC |
| Operation Interface | Industrial computer host/monitor + touch screen |
