Automated IR Inspection
- Suitable for：Si wafer
- Main mechanism composition：1.Loading 1
2.Loading 2
3.OK1
4.OK 2
5.NG
6.Aligner
7.IR inspection
Inquiry
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- Process
- Advantages
- Specifications
- Line scan is more efficient at detecting wafer pin holes.
- ROBOT load and unload wafers to increase productivity.
- Mapping function effectively detects wafer
- Precise aligner mechanism
- Improve data querying by optimizing LOG functions.
| Model | WGR1750-5-IR-2 |
|---|---|
| Machine dimensions | ~1800mm (L) x 1500mm (W) x 2200mm (H) |
| Accuracy | >50um |
| Power supply | Single phase 220VAC 60HZ |
| Air pressure | 5kg/cm^2 |
| Vacuum | -80kpa |
| Machine weight | ~820kg |
| Control system | PLC |
| Operation Interface | Industrial computer host/monitor + touch screen |
