12-Inch Semi-Automatic Visual Inspection

  • Suitable for: Si wafer
  • Main Mechanism composition:1. Load Port
    2. Alignment / OCR Inspection Station
    3. Visual Inspection Stage
    4. Robotic Arm

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  • Process
  • Advantages
  • Specifications

 

 

  • SECS/GEM300 intelligent communication interface
  • Stable operation, space-saving design, and low noise
  • Supports mixed FOUP / FOSB cassettes with RFID reading capability
  • Wafer sorting and lot linking can be configured locally via manual settings
Model WGR2185-2L-GEM300
Machine dimensions ~ 2300mm (L) x 2500mm (W) x 2000mm (H)
Power supply three phase 220VAC 60HZ
Air pressure 7kg/cm^2
Vacuum -90kpa
Machine weight ~700kg
Control system PLC
Operation Interface Touch panel with industrial PC and monitor


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