EFEM – GEM300 (Auto Sorter)

  • Suitable for：Si wafer
  • Main Mechanism composition：1.Load port #1 (Unload)
    2.Load port #2 (Load)
    3.Aligner
    4.Robot

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  • Process
  • Advantages
  • Specifications

 

 

  • SECS/GEM300 Intelligent Communication Link Equipment.
  • Stable, space saving, low noise.
  • Suitable for FOUP/FOSB cassettes, with RFID reading function.
  • Automatically or manually to flip the wafer, and it can be used as a sorter.
Model WGR1600-OCR-GEM300
Machine dimensions ~ 1600mm (L) x 1300mm (W) x 1900mm (H)
Power supply three phase 220VAC 60HZ
Air pressure 5kg/cm^2
Vacuum -80kpa
Machine weight ~1200kg
Control system PLC
Operation Interface Industrial computer host/monitor + touch screen
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